Design and control of a millimeter-range piezoelectric stage using self-guided displacement-amplification flexure mechanisms

摘要

Piezoelectric flexure stages are widely used as nano-positioning systems since they have several advantages such as high resolution, fast dynamics, compact size, and simple mechanical structure. However, one of their major drawbacks is small range of motion. To enlarge the limited motion range, most conventional flexure-based nano-positioning stages use serial combinations of motion guide and displacement-amplification mechanisms. (Fig.1 (a)) These serial combinations make the stage large and its application to small scale applications such as nano-manipulation, micro-coordinate measuring machine (CMM), and micro-factor is limited.