TWO DEGREE-OF-FREEDOM NANO MOTION CONTROL AND POSITIONING STAGE WITH PARALLEL FLEXURE HINGE MECHANISM

摘要

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.