首页>
外国专利>
Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
展开▼
机译:使用摩擦驱动和挠性铰链的低成本,高速,紧凑的纳米精密运动平台的方法和设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
A friction drive including a drive shaft that is in rotational motion and in frictional contact with a follower at a contact area. The drive shaft transfers a thrust at the contact area. The follower receives the thrust and provides motion in response to the thrust. A flexure hinge couples the drive shaft to the follower with a constant force while restraining movement of the contact area in the direction of the thrust.
展开▼