Fabrication of 3-D PDMS nano-template for UV nano-imprint Lithography and Micro contact Printing by means of Grey Scale Electron Beam Lithography

摘要

The fabrication process of PDMS embossing tools for nano scale pattern transfer like it is used for step and flash imprint lithography and micro contact printing has been investigated. We added an electroplating process to achieve a mother mask for the PDMS tool that withstands a lifetime use without any kind of abrasion. The work will focus on the pattern preparation and the process step of 3-dimensional e-beam lithography. Furthermore the realization into nickel and subsequently molding into PDMS will be described.