A micromechanical mirror based on PZN-PT single crystal films

摘要

This paper presents an investigation of a stand-alone PZN-Pr film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electro mechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecommunication applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn{sub}(1/3)Nb{sub}(2/3))O{sub}3-PbTiO{sub}3 (PZN-PT) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 × 400 × 10 μm{sup}3 including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.