Electromagnetic Scatterometry Applied to In Situ Metrology

摘要

In this paper we introduce the concept of single combined field integral equation to the rapidly developing field of in-line metrology employing scatterometry. The new method is very fast and accurate with extreme versatility, enabling very rapid profile analysis of periodic and isolated features. Several examples in 2D and 3D, such as T-top profiles, contact holes and entire SRAM cells, are presented.