机译:整体计量方法:利用散射测量,临界尺寸-原子力显微镜和临界尺寸扫描电子显微镜的混合计量
GLOBALFOUNDRIES 2070 Route 52 Hopewell Junction, New York 12533;
GLOBALFOUNDRIES 2070 Route 52 Hopewell Junction, New York 12533;
GLOBALFOUNDRIES 2070 Route 52 Hopewell Junction, New York 12533;
GLOBALFOUNDRIES 2070 Route 52 Hopewell Junction, New York 12533;
GLOBALFOUNDRIES Wilschdorfer Landstraβe 101 01109 Dresden, Germany;
GLOBALFOUNDRIES Wilschdorfer Landstraβe 101 01109 Dresden, Germany;
GLOBALFOUNDRIES Wilschdorfer Landstraβe 101 01109 Dresden, Germany;
IBM Corporation 2070 Route 52 Hopewell Junction, New York 12533;
IBM Corporation 2070 Route 52 Hopewell Junction, New York 12533;
IBM Corporation 2070 Route 52 Hopewell Junction, New York 12533;
IBM Corporation 2070 Route 52 Hopewell Junction, New York 12533;
IBM Corporation 2070 Route 52 Hopewell Junction, New York 12533;
Nova Measuring Instruments, Inc.4701 Patrick Henry Drive, Suite 1701 Santa Clara, California 95054;
Nova Measuring Instruments, Inc.4701 Patrick Henry Drive, Suite 1701 Santa Clara, California 95054;
Nova Measuring Instruments, Inc.4701 Patrick Henry Drive, Suite 1701 Santa Clara, California 95054;
Nova Measuring Instruments, Inc.4701 Patrick Henry Drive, Suite 1701 Santa Clara, California 95054;
Nova Measuring Instruments, Ltd.P.O. Box 266 Weizmann Science Park Rehovot 76100, Israel;
Nova Measuring Instruments, Ltd.P.O. Box 266 Weizmann Science Park Rehovot 76100, Israel;
Nova Measuring Instruments, Ltd.P.O. Box 266 Weizmann Science Park Rehovot 76100, Israel;
Nova Measuring Instruments, Ltd.P.O. Box 266 Weizmann Science Park Rehovot 76100, Israel;
scatterometry; CD-SEM; CD-AFM; critical dimension; hybrid metrol-ogy; litho; fin-shaped field effect transistor; 3D;
机译:临界尺寸扫描电子显微镜和光学临界尺寸的混合计量共同优化
机译:临界尺寸原子力显微镜计量学中的横向尖端控制效果:大尖端极限
机译:使用倾斜束临界尺寸扫描电子显微镜应对1×节点中的FinFET计量挑战
机译:整体计量方法:利用散射测量,CD-AFM和CD-SEM的混合计量
机译:半导体亚微米和纳米临界尺寸计量学的散射法。
机译:连续梁透射电子显微镜中的Attosecond Metrology
机译:扫描电子显微镜计量中的关键问题
机译:扫描电子显微镜计量中的关键问题