MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation

摘要

We present a novel MEMS scanning mirror featuring soft polymeric suspensions of the mirror plate. The combination of the polymeric suspension and a stiff silicon mirror plate enables large scan angles with a negligible distortion of the mirror plate itself at frequencies up to 1kHz. Thus, the scan angle per applied actuation voltage is high compared to single material solutions [1]. Furthermore, the mirror is actuated by electrostatic charge separation. Therefore, no electrical connection of the mirror is required.