Influence of boron ion implantation of the mechanical properties of TiN coatings deposited by cathodic ARC evaporation

摘要

TiN coatings were deposited on SUS420J2 steel substrates by cathodic arc evaporation. Boron ions were implanted into TiN coatings at 75keV with a dose range of 1.0～8.0*10~(17) ions cm~(-2). The composition and crystallographic structure of as-deposited and implanted TiN coatings were characterized by X-ray photoelectron spectroscopy and Glancing-angle X-ray diffraction. Ball-on-disc wear tests were carried out to evaluate wear resistance of asdeposited and implanted TiN coatings. The results of wear tests showed that boron ion implantation resulted in a significant improvement in the wear resistance of TiN coatings.