Effect of Silicon Concentration on the Properties of Al-Cr-Si-N Coatings Deposited Using Cathodic Arc Evaporation

摘要

The current market requirements are related to the introduction of new protective coatings for tools and machine parts with much better performance properties. These requirements are met by the AlCrSiN coatings; however, knowledge on the adhesion of these coatings to the substrate, as well as on their corrosion resistance, is deficient. The article presents the results of technological works on the coating deposition from AlCrSi cathodes with a silicon concentration from 0 at% to 10 at% by the cathodic arc evaporation and the results of systematic studies of their structure, mechanical, tribological and electrochemical properties. A correlation between the above-mentioned properties and the silicon concentration in the AlCrSiN coatings has been found and discussed. The coatings formed from cathodes containing less than 5 at% Si crystallize in the cubic structure. The size of the crystallites decreases with the silicon concentration increase. The coatings are characterized by a high hardness with a maximum of about 37 GPa (2 at% Si). The adhesion of the coatings is almost independent of the concentration of silicon. The wear rate is about one order of magnitude higher for coatings deposited from cathodes with a silicon concentration of 5 at% and 10 at% compared to a coating with a lower silicon concentration. This finding is consistent with the results of corrosion resistance studies. The coating deposited from the cathode with 10 at% of silicon exhibits the best anticorrosion properties against the salt solution.