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Structure and Properties of AlCrN Coatings Deposited Using Cathodic Arc Evaporation

机译:使用阴极弧蒸发沉积的Alcrn涂层的结构和性质

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摘要

Al–Cr–N coatings were formed at various nitrogen pressures, substrate bias voltages and substrate temperatures using cathodic arc evaporation. The relationship between technological parameters and properties of the coatings was investigated. The phase and chemical composition of the coatings, roughness, hardness, adhesion and thermal stability were analyzed by X-ray diffraction (XRD), scanning electron microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX), micro-indenter, Rockwell, scratch tester and thermomechanical methods. The corrosion resistance of selected coatings was also investigated. XRD analysis indicates that the coatings crystallize in a cubic structure and show preferential orientation (200) CrN. With the increase of nitrogen pressure, the preferential orientation changes to (111). EDX analysis shows that as nitrogen pressure increases, the Al/(Al Cr) rate decreases. Microscopic observations indicate that the number of macroparticles reduces as nitrogen pressure increases. As a result, the surface roughness parameter Ra of the coatings decreases. The effects of deposition temperature, nitrogen pressure and substrate bias voltage on the mechanical and tribological properties of the coatings were investigated. It was found that the above parameters influence the mechanical properties in different ways. The hardness and adhesion of coatings formed at higher temperatures was lower. Coatings formed under a higher nitrogen pressure or substrate bias voltage were characterized by higher hardness and better wear resistance.
机译:使用阴极电弧蒸发在各种氮气压力下形成Al-Cr-N涂层,基板偏置电压和基板温度。研究了涂料的技术参数与性质之间的关系。通过X射线衍射(XRD),扫描电子显微镜(SEM),能量分散X射线光谱(EDX),微压缩,微内压,微肾上腺位,微压,分析涂层,粗糙度,硬度,粘附和热稳定性的相和化学成分,扫描电子显微镜(SEM),罗克韦尔,划痕测试仪和热机械方法。还研究了所选涂层的耐腐蚀性。 XRD分析表明涂层以立方结构结晶并显示优先定向(200)CRN。随着氮气压力的增加,优先取向变为(111)。 EDX分析表明,随着氮气压力的增加,Al /(Al Cr)速率降低。显微镜观察表明,大颗粒的数量随着氮气增加而降低。结果,涂层的表面粗糙度Ra降低。研究了沉积温度,氮气压力和衬底偏置电压对涂层机械和摩擦学性质的影响。结果发现上述参数以不同方式影响机械性能。在较高温度下形成的涂层的硬度和粘附较低。在较高的氮气压力或衬底偏置电压下形成的涂层的特征在于硬度更高,耐磨性更高。

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