Structure, Morphology, and Mechanical Properties of AlCrN Coatings Deposited by Cathodic Arc Evaporation

摘要

AlCrN coatings were deposited on steel substrates (HS6-5-2) using cathodic arc evaporation. The effect of nitrogen pressure on the properties of CrAlN coatings formed from Al80Cr20 cathode, such as chemical and phase composition of the coatings, surface morphology, deposition rate, hardness and adhesion to the substrate, and friction and wear were investigated. The coating deposited at nitrogen pressure of 3 Pa shows the highest deposition rate. The roughness parameter Ra of the coating surface decreases with increasing nitrogen pressure during its formation. The test results showed that the AlCrN coatings deposited under nitrogen pressure in the range from 1 to 5 Pa show similar hardness for all the coatings, which is around 17 GPa. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate, although the wear rate is rather good, about 1.4 x 10(-7) mm(3)/Nm. The coatings deposited at nitrogen pressure of 3-4 Pa are characterized by the highest critical load, 95 N. Despite worse adhesion, these coatings are characterized by high resistance to wear, the wear rate is about 1.4 x 10(-7) mm(3)/Nm.