Oxide film deposition by gas-cluster ion assisted deposition

摘要

The development of ultra-high quanity (UHQ) films is in progress under the NEDO projects*. This project is acollaboration between several companies, national laboratories and universities. A Multi-Beam Gas-Cluster IOn Beam System has been developed for fabricating indium tin oxide (ITO) films. The concept of a multi-beam deposition technique, the description of the MUlti-Beam GSas Cluster IOn Beam System as well as our current progress on this project are presented.