Hybrid method combining SACE micro-machining and laser processing to fabricate glass micro-features with special surface properties

摘要

In this work, a relatively simple and low-cost hybrid method that combines spark assisted chemical engraving (SACE) and high intensity laser induced reverse transfer (HILIRT) to fabricate glass micro-features with specialized surface properties is presented. The capability of SACE to machine glass coated with Titanium nanofibers is demonstrated. The results will be applied to fabricate Lab-on-chips devices for different applications.