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Equipment for laser micro-machining and method for laser micro-machining
Equipment for laser micro-machining and method for laser micro-machining
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机译:激光微加工设备和激光微加工方法
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摘要
The described embodiments relate to laser micromachining a substrate. One exemplary method includes forming a feature into a substrate, at least in part, by directing a laser beam at the substrate. During at least a portion of said forming, the method includes supplying liquid to at least a first region of the feature along a first liquid supply path and supplying liquid to at least a second different region of the feature along at least a second liquid supply path.
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