LASER ASSISTED MICRO-MACHINING SYSTEM AND METHOD FOR MICRO-MACHINING USING THE SAME

摘要

In a laser-assisted micromachining system and a micromachining method using the same, the micromachining system includes a laser transfer unit, a processing unit, and a workpiece transfer unit. The laser transmission unit irradiates a laser beam to the workpiece to heat the workpiece. The processing unit includes a tool part for processing the workpiece heated by the laser beam. The workpiece transport unit holds and transports the workpiece. The laser beam passes through a machining area ahead of the tool part by a predetermined distance to heat the workpiece.