Depending on the size and geometry, laser-microfabricated structures in transparent materials have applications in telecommunications, microfluidics, micro-sensors, data storage, glass cutting and decorative marking applications. The relations of Nd:YV04 and C02 laser system parameter settings to the dimensions and morphology of microfabricated structures were examined in this work. Laser system parameters investigated included power, P, pulse repetition frequency, PRF, number of pulses, N, and scanning speed, U. Output dimensions measured included equivalent voxel diameter as well as microchannel width, depth and surface roughness.ududA 3D microfabrication system was developed using the Nd:YV04 laser (2.5 W, 1.064 pm, 80 ns) to fabricate microstructures inside polycarbonate samples. Microstructure voxels ranged from 48 to 181 pm in diameter. Tight focusing was also achieved with this system using a microscope objective lens to produce smaller voxels ranging from 5 to 10 pm in soda-lime glass, fused silica and sapphire samples.ududThe C02 laser (1.5 kW, 10.6 pm, minimum pulse width of 26 ps) was used to fabricate microchannels in soda-lime glass samples. The cross-sectional shapes of the microchannels varied between v-shape grooves, u-shaped groves and superficial ablated regions. Microchannels dimensions also varied with widths ranging from 81 to 365 pm, depths ranging from 3 to 379 pm and surface roughness between 2 to 13 pm being produced depending on the process settings. The microchannel dimensions were studied in terms of the laser processing parameters using the response surface methodology (RSM) with the design of experiments technique (DOE). The collected results were used to study the effect of the process parameters on the volumetric and mass ablation rates. Moreover, a thermal mathematical model of the process was also developed in order to aid understanding of the process and to allow channel topology prediction a priory to actual fabrication.
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机译：根据尺寸和几何形状，透明材料中的激光微加工结构可用于电信，微流控，微传感器，数据存储，玻璃切割和装饰标记应用。在这项工作中，研究了Nd：YV04和CO2激光系统参数设置与微细结构的尺寸和形态之间的关系。研究的激光系统参数包括功率，P，脉冲重复频率，PRF，脉冲数，N和扫描速度U。测量的输出尺寸包括等效体素直径以及微通道宽度，深度和表面粗糙度。 ud udA 3D使用Nd：YVO4激光（2.5 W，1.064 pm，80 ns）开发了微细加工系统，以制造聚碳酸酯样品内部的微结构。微结构体素的直径范围为48至181 pm。该系统还使用显微镜物镜实现了严格聚焦，可在钠钙玻璃，熔融石英和蓝宝石样品中产生从5 pm到10 pm的较小体素。 ud udCO2激光（1.5 kW，10.6 pm，最小脉冲） （宽度为26 ps）用于制造钠钙玻璃样品中的微通道。微通道的横截面形状在v形凹槽，u形凹槽和表面烧蚀区域之间变化。微通道的尺寸也随工艺设置而变化，其宽度范围为81至365 pm，深度范围为3至379 pm，表面粗糙度在2至13 pm之间。使用响应表面方法（RSM）和实验技术（DOE）的设计，根据激光加工参数研究了微通道尺寸。收集的结果用于研究工艺参数对体积和质量消融速率的影响。此外，还开发了该过程的热数学模型，以帮助理解该过程并允许在实际制造之前先进行通道拓扑预测。
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