Room temperature sputter depsotion of polycrystalline ITO for photodetectors

机译：用于光电探测器的多晶ITO的室温溅射DEPSOTION

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We report the sputter d eposition of indium tin oxide (ITO) at room temperature in pure argon (Ar) at different sputtering powers. The film transmittance is more than 80

机译：在不同的溅射功率下，在纯氩（AR）的室温下报告氧化铟锡（ITO）的溅射D映形。薄膜透射率超过80

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《Symposium on thin film transistor technologies》|1999年||共13页
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Oqinghua Ma; Arokia Nathan; Electrochemical Society Inc.;
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中图分类半导体三极管（晶体管）;
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1. Low temperature growth of polycrystalline silicon films by RF sputtering method (2nd report) -Structure, electric and optical properties of the polycrystalline silicon films- [J] . Hiroaki Kakiuchi, Kumayasu Yoshii, Kiyoshi Yasutake 精密工学会誌 . 1997,第2期

机译：通过射频溅射法低温生长多晶硅膜（第二次报告）-多晶硅膜的结构，电学和光学性质-
2. Depositioni of Polycrystalline AIN Thin Films by Coherent Magnetron Sputtering at Temperatures <80 deg C [J] . A.K.CHU, C.H.CHAO, F.Z.LEE, Journal of Electronic Materials . 2001,第1期

机译：<80摄氏度温度下通过相干磁控溅射沉积多晶AIN薄膜
3. High-performance high-temperature solar-blind photodetector based on polycrystalline Ga2O3 film [J] . Zhou Hai-tao, Cong Lu-jia, Ma Jian-gang, Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2020,第1期

机译：基于多晶GA2O3薄膜的高性能高温太阳盲光电探测器
4. Room temperature sputter depsotion of polycrystalline ITO for photodetectors [C] . Oqinghua Ma, Arokia Nathan, Electrochemical Society Inc. Symposium on thin film transistor technologies . 1999

机译：用于光电探测器的多晶ITO的室温溅射DEPSOTION
5. The effect of the sputtering parameters on the ITO films deposited by RF magnetron sputtering [D] . Jung, Jihoon. 2011

机译：溅射参数对RF磁控溅射沉积ITO膜的影响
6. Electrical Properties of Thin-Film Capacitors Fabricated Using High Temperature Sputtered Modified Barium Titanate [O] . Glyn J. Reynolds, Martin Kratzer, Martin Dubs, 2012

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7. Performance improvement of polycrystalline diamond ultraviolet photodetectors by room-temperature plasma treatment [O] . Wang, SG, Sellin, PJ, Lohstroh, A, 2005

机译：室温等离子体处理提高多晶金刚石紫外光电探测器的性能
8. Preparation of Sn-Doped In2O3 (ITO) Films at Low Deposition Temperatures by Ion-Beam Sputtering. [R] . Fan, J. C. C. 1978

机译：离子束溅射制备低掺杂sn掺杂In2O3（ITO）薄膜。

Room temperature sputter depsotion of polycrystalline ITO for photodetectors

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