Study on nature of humidity sensitivity of porous silicon

摘要

In this paper,we present the makign method and formed conditions of humidity sensitivity porous silicon(PS),and study the influence of environment humidity on sesistance of PS.The resistance of PS increases in direct ratio with the time of humidity sucking.Humidity conductance of PS is ionic conduction that was proved by experiment.Therefore,we can discuss the nature of humidity sensitivity of PS by Grothus transmission theory of proton.The results that the resistance of PS increases in diect ratio with environmental humidity were derived.