MIM Manufacturing method of High-Sensitivity and Low-Hysteresis Porous MIM-Type Capacitive Humidity Sensor Using Functional Polymer Mixed with titanium dioxide Microparticles

摘要

The present invention improves the properties of a porous metal-insulator-metal (MIM) type capacitive humidity sensor using a functional polymer mixed with TiO ₂ fine particles and a porous upper electrode, and provides a high sensitivity, low-hysteresis, A low-hysteresis porous MIM-type capacitive humidity sensor using a functional polymer mixed with TiO ₂ microparticles, which realizes a high-sensitivity, low-hysteresis porous MIM-type capacitive humidity sensor. And a manufacturing method thereof. The humidity sensor consists of an optimally designed porous upper electrode, a functional polymer moisture sensing layer, a lower electrode and a glass substrate. The porous top electrode is designed to increase the contact area between the sensing layer and the water vapor to provide a high sensitivity and a fast response time. Functional polymers mixed with TiO ₂ microparticles have excellent low-hysteresis characteristics over a wide humidity sensing range and are excellent in long-term stability. The humidity sensor provides a high sensitivity of 0.85pF /% RH and a fast response time of less than 35 seconds when the relative humidity reaches 10% RH to 90% RH. In addition, the humidity sensor has a very low hysteresis of 0.95% RH at 60% RH, good temperature dependency, and stable capacitance values of up to 0.17% error rate during 120 hours of continuous testing.