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Fine pitch wire bonding development using a new multipurpose, multi-pad pitch test die

机译:使用新型多功能,多垫俯仰试验模具进行细间距引线开发

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A multipurpose, multipad pitch test die with pad pitches ranging from 5 mil down to 3 mil, suitable for evaluating gold-ball bonding, aluminum wedge bonding, tape automated bonding (TAB), array bonding, wafer probes, and molding operations has been designed and manufactured. The author reviews the design features of this multipurpose, multipad pitch test die, and presents the statistical design of experiment strategy taken in developing a wire bond process for very-fine-pitch assembly based on this test die. The effect of major bonding parameters on bond ball size and ball shear force is discussed. A statistical method for predicting the ball shorting rate is compared with actual assembly yield data. The experimental results show that using a K&S 1484 bonder with a bottleneck capillary and 1.3-mil-diameter gold wire bonding down to 4.5-mil pad pitch has reasonably good yields. The projected ball shorting rate for 4.5-mil pad pitch is 0.02% for a 128-pad device, or 0.03% for a 160-pad or 208-pad device. The projected ball shorting rate for a 4.3-mil pad pitch die with 128 pads is 0.39%.
机译:多用途,多层俯仰试验模具,带有5个MIL到3密耳的垫间距,适用于评估金球键合,铝楔形键合,带自动粘合(TAB),阵列粘接,晶片探针和模制操作。并制造。作者审查了该多用途,多层俯仰试验模具的设计特征,并提出了在基于该测试模具开发用于非常细小的音调组件的线键合工艺的实验策略的统计设计。讨论了主要粘合参数对粘合球尺寸和球剪力力的影响。将用于预测球短路率的统计方法与实际组装产生数据进行比较。实验结果表明,使用K&S 1484粘合剂具有瓶颈毛细管和1.3密耳直径的金线键合至4.5耳垫间距,收益率合理。对于128垫装置,4.5密耳焊盘间距的投影球短路率为0.02%,或者为160垫或208垫装置的0.03%。具有128垫的4.3密耳垫间距模具的投影球短路率为0.39%。

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