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Gold-silicon fiber shorts in VLSI devices

机译:VLSI器件中的金色纤维短裤

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An analysis and documentation method used to expose fibrous gold-silicon particle shorts was developed. The particles are a consequence of the die bond scrub-in being performed in an oxidizing atmosphere. Initially attached to the substrate, the fibers become detached during vibration or temperature cycling and cause intermittent shorts. It is shown that this particle generating tendency can be eliminated by using an adequate amount of cover gas concentration, which eliminates oxidation of the silicon. The bonding pressure, amplitude, duration, and temperature are other process parameters requiring optimization.
机译:开发了用于暴露纤维金硅粒子短路的分析和记录方法。颗粒是在氧化气氛中进行的模键擦伤的结果。最初附着在基板上,纤维在振动或温度循环期间分离并导致间歇短路。结果表明,通过使用足量的覆盖气体浓度可以消除该颗粒产生趋势,这消除了硅的氧化。键合压力,幅度,持续时间和温度是需要优化的其他工艺参数。

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