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Gold-silicon fiber shorts in VLSI devices

机译:VLSI设备中的金硅纤维短裤

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An analysis and documentation method used to expose fibrous gold-silicon particle shorts was developed. The particles are a consequence of the die bond scrub-in being performed in an oxidizing atmosphere. Initially attached to the substrate, the fibers become detached during vibration or temperature cycling and cause intermittent shorts. It is shown that this particle generating tendency can be eliminated by using an adequate amount of cover gas concentration, which eliminates oxidation of the silicon. The bonding pressure, amplitude, duration, and temperature are other process parameters requiring optimization.
机译:开发了一种用于暴露纤维状金-硅颗粒短裤的分析和记录方法。颗粒是在氧化气氛中进行芯片键合擦洗的结果。最初附着在基材上的纤维在振动或温度循环过程中会脱落,并导致间歇性短路。已经表明,通过使用适当量的覆盖气体浓度可以消除这种颗粒生成趋势,这消除了硅的氧化。键合压力,振幅,持续时间和温度是其他需要优化的工艺参数。

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