Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator

摘要

Interrogation tools are the key to a thorough understanding of any technology. Texas Instruments' DLP(R) Products -Digital Mirror Device is no exception to this rule. We will discuss the application of a non-destructive, through-glass interferometer system toward gaining insight to the degree of structural uniformity of a statistically significant sampling of micro-opto-electromechanical (MOEM) mirrors as used in our product line. In the course of providing this information, instrumentation details such as reliability and reproducibility of measurements obtained on this interferometer will be discussed. Additionally, the importance of this mechanical uniformity to displaying images with this spatial light modulator (SLM) will be discussed as well.