MOEMS Fabry-Perot interferometer with point-anchored Si-air mirrors for middle infrared

摘要

We studied how a micromachined Fabry-Perot interferometer, realized with wide point-anchored Si/air-gap reflectors, performs at the middle-infrared. A computational analysis of the anchor mechanical behavior is also presented. Compared with solid-film reflectors, this technology features better index contrast, which enables a wider stop band and potentially higher resolution. In this work, we investigate whether the performance is improved according to the index-contrast benefit, or whether the mechanical differences play a role. For comparison, we manufactured and characterized another design that applies solid-film reflectors of Si/SiO_2 structure. This data is exploited as a reference for a middle-infrared interferometer and as a template for mapping the performance from the simulation results to the measured data. The novel Si/air-gap device was realized as a non-tunable proof-of-concept version. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the measured transmission and resolution data and compare the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si/air-gap device is then presented. The results indicate that the interferometer's resolution is expected to have improved twofold and have a much wider stop band compared with the prior art.