Mirror plate for Fabry-Perot interferometer, and Fabry-Perot interferometer

摘要

A method for producing a mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - providing a substrate (50), which comprises silicon (Si), - implementing a semi-transparent reflective coating (110) on the substrate (50), - forming a passivated region (70a) in and/or on the substrate (50) by etching a plurality of voids (E1) in the substrate (50), and by passivating the surfaces of the voids (E1), - forming a first sensor electrode (G1a) on top of the passivated region (70a), and - forming a second sensor electrode (G1b) supported by the substrate (50).