A MIRROR PLATE FOR A FABRY-PEROT INTERFEROMETER AND A FABRY-PEROT INTERFEROMETER

摘要

A method for producing a mirror plate for a Fabry-Perot interferometer includesproviding a substrate, which includes silicon,implementing a semi-transparent reflective coating on the substrate,forming a passivated region in and/or on the substrate by etching a plurality of voids in the substrate, and by passivating the surfaces of the voids,forming a first sensor electrode on top of the passivated region, andforming a second sensor electrode supported by the substrate.