Magnetostrictive 2-D scanners and pig-tailed tunable MEMSfilters-studies on vacuum packaging and interconnection of optical MEMS

摘要

The key concept of micromachining technologies is to extend theVLSI fabrication capability to realize three-dimensional microsystemswhich are composed of electrical, mechanical, chemical and opticalelements. Using VLSI fabrication processes such as photolithography,film deposition and etching, it is possible to obtainsub-micrometer-precision structures in a large quantity with excellentalignment between each other. In addition, movable structures such asmicro gears and motors can be made by surface micromachining processes.Precise V-grooves and moles going through the substrate can be etched bpdry and wet etching. Such micromachining technologies have the followingimplications for optical systems: integration of devices; accuratepre/passive alignment; feature size comparable to wavelength; arrayedand repetitive structures; wavelength independence; free-space opticswith short propagation path; high sensitivity and fast response; localservo feedback; hermetic/vacuum packaging. Examples of theseimplications are given for a pigtailed silicon platform for integratingoptical fibres and micromachined devices, and a 2D micro-optical scanner