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Magnetostrictively Actuated Resonators for Contactless, Fast and Robust 2-D Micro-Optical Scanners

机译:磁致伸缩谐振器,用于非接触式,快速且坚固的二维微光学扫描仪

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摘要

One of the challenging problems in microsystems is supplying power without wires. Since the scaling law prohibits a microsystem from holding large amount of energy in it, remote power sources through some kind of field are an attractive alternative. Because of its magnetic nature, magnetostriction enables such a wireless actuation. Moreover, its maximum available strain is comparable or better than that of piezoelectric actuation and its response time is in the 10~(-9) -10~(-13) second range that makes the main speed limitation depending mainly on the mechanical structure design. Recent achievements in material science enables thin film deposition of a few magnetostrictive materials. Some of them have been successfully used in MEMS. For instance, static deflections up to 200 micrometers on millimeter-sized cantilevers have been reported.
机译:微系统中具有挑战性的问题之一是没有电线就供电。由于缩放定律禁止微系统在其中保留大量能量,因此通过某种领域的远程电源是一种有吸引力的选择。由于其磁性质,磁致伸缩使得能够进行这种无线致动。而且,它的最大可用应变与压电致动的应变相当或更好,其响应时间在10〜(-9)-10〜(-13)秒范围内,这主要限制了速度,主要取决于机械结构设计。材料科学领域的最新成就使一些磁致伸缩材料能够薄膜沉积。其中一些已成功用于MEMS。例如,已经报道了在毫米大小的悬臂上高达200微米的静态挠度。

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