首页> 外文会议>Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on >Review on electrodepositable photoresists and their possible ways to use them with laser direct imaging
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Review on electrodepositable photoresists and their possible ways to use them with laser direct imaging

机译:回顾可电沉积的光刻胶及其在激光直接成像中的使用方式

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In the last about ten years a new trend made itself to foreground. This trend is to use polymers and sensitizers from which electrodepositable (ED) photoresist can be made. While the laminated dry film photoresists are highly thicker than 1 mil, an electrodeposited polymer coating is thinner than 1 mil. This parameter allows us to make extremely narrow tracks without short circuits or break of continuity. Moreover the ED resists can coat three dimensional substrates. These two advantages are the main reason to use ED resists in the future, as an alternative way beside dry film resists. The poster is made to be as a review on the present day works in the area of ED resists. The usable photosensitizers and polymers will be shown as they behave in the photoreactions. Also the ED resist creating method, the advantages and disadvantages will be presented.
机译:在过去的大约十年中,一种新的趋势逐渐成为人们关注的焦点。这种趋势是使用可以制成可电沉积(ED)光致抗蚀剂的聚合物和敏化剂。尽管层压的干膜光致抗蚀剂高度厚于1密耳,但电沉积的聚合物涂层却薄于1密耳。此参数使我们可以制作极窄的轨道,而不会发生短路或连续性中断。而且,ED抗蚀剂可以涂覆三维基底。这两个优点是将来使用ED抗蚀剂的主要原因,这是除干膜抗蚀剂之外的另一种选择。该海报是现今ED抗蚀剂领域的回顾。可用的光敏剂和聚合物将在光反应中表现出来。还将介绍ED抗蚀剂的形成方法,优点和缺点。

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