Design and Performance of a Microactuator with Multi Degrees of Freedom

摘要

We describe the design and performance of a microactuator with six degrees of freedom (DOF). The six DOF motion is realized by using six piezo elements and three electromagnets. The microactuator is similar to the Stewart-platform which realizes a small linear and rotational displacement. We utilize the principle of an inchworm which realizes a three DOF large operating area on a surface.