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MICROACTUATOR HAVING MULTIPLE DEGREES OF FREEDOM
MICROACTUATOR HAVING MULTIPLE DEGREES OF FREEDOM
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机译:具有多种自由度的微执行器
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摘要
A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.
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