Recipe generation for large-area meniscus coating using Kalmanfilter estimation

摘要

Material deposition is one of the repeated, and important, stepsin electronics manufacturing. Meniscus coating is a low-waste techniquethat may be used in applications where spin coating is found. Theprocess exhibits time-varying behavior and thus utilizing feedbackcontrol methods to compensate for this behavior is desirable. This paperdescribes the large-area meniscus coating process, explains modelingtechniques used and presents results from closed-loop experiments.Feedback in the form of Kalman filtering and EWMA filtering iscontrasted, with Kalman Filter techniques improving performanceconsiderably. These process control techniques require no additionalhardware and therefore very little cost is associated withimplementation of these feedback algorithms