Characterization of a Resonant Lorentz Force MEMS Magnetometer

摘要

This paper presents the preliminary characterization of a Micro-Electro-Mechanical (MEMS) magnetometer that operates based on the Lorentz force principle. The device is fabricated using a MEMSCAP SOIMUMPs foundry process with $a25 mu m$ thick Silicon layer. DC and modal analysis are conducted to identify the static capacitance and resonance frequency of the design, which are reported as 1.463 pF and 43.15 kHz, respectively. Furthermore, the device was tested under ambient conditions for static capacitance. The measurement result of 1.928 pF shows an adequate agreement with the simulated result.