A 360 V high voltage reconfigurable charge pump in 0.8 μm CMOS for optical MEMS applications

摘要

A 31 stages high voltage reconfigurable charge pump is presented for electrostatic actuation of an optical laterally rotating MEMS mirror. A maximum output voltage of 360.5 V with a rise time of 16.7 ms for a clock frequency of 62.5 kHz is demonstrated through simulations. A variable amplitude clock generator is implemented within the same circuit to control the voltage levels of the charge pump. The maximal output ripple is 1.1 V for a 10 pF load, representing a small relative deviation of 0.31% suitable for MEMS electrostatic actuation. The average step between two consecutive output voltages is 4.9 V between 50 V and 340 V. This small increment enables the fine tuning of the MEMS rotation angle. The circuit is designed in a 0.8 μm high voltage CMOS technology and has an area of 675 μm × 1100 μm.