acoustic resonator filters; band-pass filters; bulk acoustic wave devices; compensation; crystal resonators; optimisation; piezoelectricity; thin film devices; Ru-AlN-Ru-SiOF-Ru; TC-BAW filter applications; TC-BAW resonator; TC-FBAR; TCF; TCV; bandpass filter; effective electromechanical coupling factor; layer structure optimisation; piezoelectric coupling factor; positive temperature coefficient of velocity; temperature coefficient of frequency; temperature compensated thin film bulk acoustic resonator; wireless communication system; Absorption; Films; Wireless communication; effective electromechanical coupling factor; fluorine-doped silicon oxide; temperature coefficient of frequency; temperature coefficient of velocity; temperature-compensated thin film bulk acoustic wave resonator;
机译:用于GHz范围薄膜体声谐振器的Pb(Zr,Ti)O_3基三元钙钛矿化合物的高耦合压电薄膜
机译:高音体声波谐振器技术提取压电薄膜的机电耦合常数
机译:使用体声波谐振器提取薄膜压电材料的机电耦合常数
机译:温度补偿膜散装声谐振器中增加的压电耦合因子
机译:声微流PZT换能器和温度补偿薄膜体声谐振器。
机译:使用基于Au / n-ZnO /压电-ZnO / Al结构的薄膜体声谐振器进行UV感测
机译:用于GHz范围薄膜体声谐振器的Pb(Zr,Ti)O-3-基三元钙钛矿化合物的高耦合压电薄膜