In this paper, we present high voltage NLDMOS structure with multiple RSEURF concepts. The NLDMOS is based on 0.35μm BCD process. The multiple RESURF device base on charge balance theory using P-top and N-top to achieve high breakdown voltage and low on-resistance. The 2D simulation result compares the conventional single RESURF NLDMOS structure and the new structure with multiple RESURF devices. The new device concept help to improve the on-resistance up to 20% were as keeping the breakdown voltage still in the acceptable range for 40V rated device. The 2D simulation is using by process simulator Tsuprem4 and Medici to verify the device concept and identify the electrical characteristics.
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