An infrared detector based on SWNT film suspended on double cantilever

摘要

An infrared detector based on single wall nanotube (SWNT) film suspended on double-cantilever is proposed and fabricated. The operation principle of the proposed infrared detector is a simultaneous measurement of electrical resistance change induced by thermal radiation on the SWNT film and mechanical stress induced from bimetal-type double-cantilever. Measured temperature coefficient of resistance (TCR) of an proposed bolometer was −1.82 %/K in the temperature range of 20–80 celsius temperature degree. The responsivity (R) of the proposed bolometer was 310,000 V/W at bias currents of 500 µA and detectivity was 2.62×10 cmW. By adding mechanical-stress induced IR measurement function using double cantilever on SWNT-based bolometer, a superior performance has been achieved.