首页>
外国专利>
INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF
INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF
展开▼
机译:带有基于SWNT的双悬臂的红外探测器及其制造
展开▼
页面导航
摘要
著录项
相似文献
摘要
A double-cantilever infrared detector based on single walled carbon nanotube and the manufacture method thereof are provided. The detector comprises: a substrate having a detection window extending through the substrate from the top surface to the bottom surface; two heterogeneous cantilevers, wherein each cantilever is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between the two free ends of the two heterogeneous composite cantilevers, wherein the heterogeneous cantilevers include a first material layer and a second material layer located thereon, and the first material layer and the second material layer have different thermal expansion coefficients.
展开▼