Double-Cantilever Infrared Detector: Fabrication, Curvature Control and Demonstration of Thermal Detection

摘要

This paper reports the recent progress on the development of double-cantilever infrared (IR) detectors, including the fabrication using a low-temperature surface micromachining module with two sacrificial layers of polyimide, the post-process curvature control using rapid thermal annealing (RTA), and also the first-time demonstration of thermal detection using capacitive-based IR FPAs.