Semiconducting YBaCuO pyroelectric infrared detectors on suspended Si/sub 3/N/sub 4/ films

摘要

Uncooled, micromachined pyroelectric infrared detectors based on semiconducting YBaCuO were fabricated and characterised at room temperature. The detectors were fabricated with CMOS compatible techniques that demonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 /spl mu/C/cm/sup 2/K and detectivities over 10/sup 8//spl middot/cm Hz/sup 1/2//W were measured.