Grain Growth and Characteristics of Chlorine Doped Thick Polycrystalline CdZnTe Films

摘要

Chlorine (Cl)-doped polycrystalline CdZnTe is expected to be used as photoconductor material for Flat Panel X-ray detectors (FPDs) due to its high detection efficiency and environmental resistance. However, polycrystalline film causes great variability among pixels in the X-ray image of FPDs. To reduce the variability among pixels, chlorine doping methods and their effects were investigated. By combining the two methods, the addition of CdCl_2 to the source and the introduction of vapor chloroform during deposition, we were able to reduce the variability among pixels.