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Chemical vapor-deposited boron-doped polycrystalline diamond thin film growth on silicon and sapphire: Growth, doping, metallization, and characterization

机译：化学气相沉积硼掺杂多晶金刚石薄膜在硅和蓝宝石上的生长：生长，掺杂，金属化和表征

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作者
Golestanian, Hassan;
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作者单位

University of Missouri - Columbia;

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授予单位 University of Missouri - Columbia;
学科
学位 Ph.D.
年度 1997
页码 136 p.
总页数 136
原文格式 PDF
正文语种 eng
中图分类
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2. 铌基体上硼掺杂金刚石薄膜电极的制备、表征和电化学性能（英文） [J] . 余志明, 王健, 魏秋平, 中国有色金属学报：英文版 . 2013,第005期
3. Influence of growth pressure on the electrical properties of boron-doped polycrystalline diamond films [J] . Z.L. Wang, C. Lu, J.J. Li, Applied Surface Science . 2009,第23期

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5. A study of the crystalline growth of highly boron-doped CVD diamond: preparation of graded-morphology diamond thin films [J] . Yasuaki Einaga, Gyu-Sik Kim, Soo-Gil Park, Diamond and Related Materials . 2001,第3aPta1期

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6. Boron-Doped Polysilicon: Growth Kinetics and Structural Study of Low-Pressure Chemical Vapour Deposited Films in the Case of High Doping Levels [C] . E., R. Berjoan, B. de Mauduit, International conference on polycrystalline semiconductors . 2001

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7. Polycrystalline silicon thin films by metal -induced growth: Formation mechanisms, characterization and applications [D] . Guliants, Elena A. 2000

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8. Enhanced Growth and Osteogenic Differentiation of Human Osteoblast-Like Cells on Boron-Doped Nanocrystalline Diamond Thin Films [O] . Lubica Grausova, Alexander Kromka, Zuzana Burdikova, 2008

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10. Studies of the Growth and Doping of Diamond Thin Films [R] . 2002

机译：金刚石薄膜的生长和掺杂研究

Chemical vapor-deposited boron-doped polycrystalline diamond thin film growth on silicon and sapphire: Growth, doping, metallization, and characterization

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