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Integrated Thick-Film P-i-p~+ Structures Based On Spinel Ceramics

机译:基于尖晶石陶瓷的集成厚膜P-i-p〜+结构

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Multilayered temperature/humidity sensitive thick-film p-i-p~+ structures based on spinel-type semiconducting ceramics of different chemical composition (Cu_(0.1)Ni_(0.1)Co_(1.6)Mn_(1.2)O_4 with p~+-type of electrical conductivity, Cu_(0.1)Ni_(0.8)Co_(0.2)Mn_(1.9)O_4 with p-type of electrical conductivity) and magnesium aluminate i-type MgAl_2O_4 ceramics, as well as temperature-sensitive p-p~+ and p-p~+-p structures were prepared and studied. Temperature-sensitive thick-film structures possess good electrophysical characteristics before and after long-term ageing test at 170 °C and the drift of electrical resistance is no more than 1 %. Increase of the quantity of thick-film layers (from two to three) results in the improvement of the temperature sensitivity of thick-film structures. It is shown, that just prepared humidity-sensitive thick films in one-layered form posses good linear dependence of electrical resistance on relative humidity without hysteresis in the range of 40-99 %. Low sensitivity of these elements at normal physical condition is connected with the degradation process over contact area. Integrated p-i-p~+ thick-film structures are stable in time and can be successfully applied for integrated environmentntal sensors.
机译:基于化学成分不同的尖晶石型半导体陶瓷(Cu_(0.1)Ni_(0.1)Co_(1.6)Mn_(1.2)O_4具有p〜+型导电性的多层温度/湿度敏感厚膜pip〜+结构,具有p型导电性的Cu_(0.1)Ni_(0.8)Co_(0.2)Mn_(1.9)O_4)和铝酸镁i型MgAl_2O_4陶瓷以及对温度敏感的pp〜+和pp〜+ -p结构进行了准备和研究。对温度敏感的厚膜结构在170°C的长期老化之前和之后均具有良好的电物理特性,并且电阻的漂移不超过1%。厚膜层的数量的增加(从两层到三层)导致厚膜结构的温度敏感性的提高。结果表明,仅以一层形式制备的对湿度敏感的厚膜具有电阻对相对湿度的良好线性依赖性,而没有在40-99%范围内的滞后。这些元素在正常物理条件下的低灵敏度与接触面积上的降解过程有关。集成的p-i-p〜+厚膜结构时间稳定,可以成功地应用于集成的环境传感器。

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