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True bulk GaN technology for high efficiency devices

机译:真正的块状GaN技术用于高效器件

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As GaN device technologies confront the need to increase yield and performance metrics, expected material improvements will come from the use of lattice-matched substrates. There is a growing interest in utilizing low-defect density GaN substrates for certain high performance applications. Manufacturers who make use of true bulk substrates will have the first opportunity to achieve the theoretically predicted performance and reliability for GaN-based devices. This paper will outline the progress of bulk GaN crystal growth techniques, and compare their various merits and deficiencies. Solvothermal growth, flux growth, and vapor phase growth are the main contenders that must prove their ability to provide high quality material consistently and at a competitive price. To validate their claims, we will discuss issues such as wafer purity, defect density, lattice bending, growth rate, and reproducibility.
机译:随着GaN器件技术面临提高产量和性能指标的需求,预期的材料改进将来自晶格匹配衬底的使用。将低缺陷密度的GaN衬底用于某些高性能应用的兴趣日益浓厚。利用真正的块状衬底的制造商将有第一个机会来实现GaN基器件的理论上预期的性能和可靠性。本文将概述块状GaN晶体生长技术的进展,并比较它们的各种优缺点。溶剂热生长,助熔剂生长和气相生长是主要的竞争者,必须证明其能够始终如一地以有竞争力的价格提供高质量材料的能力。为了验证他们的主张,我们将讨论晶片纯度,缺陷密度,晶格弯曲,生长速率和可再现性等问题。

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