A double-end fixed beam structure of MEMS piezoresistive high g accelerometer

摘要

To satisfy the requirement of measuring high shock acceleration for hard target smart fuze, a double-end fixed beam structure of MEMS piezoresistive high g accelerometer is proposed. The designed sensor is based on the combination of Silicon on Insulator (SOI) solid piezoresistive material and Micro Electro Mechanical Systems (MEMS) technique. Based on the principle of the sensor, stress analysis and mode analysis of the accelerometer are performed with FEA (finite-element analysis), to determine the position of piezoresistor and ensure that the sensor will not be destroyed in the overload conditions. The test results, obtained by MAXITE machine and live ammunition test, show that the accelerometer can detect the acceleration of high shock successfully, and the measurement range of the accelerometer is higher than 50,000g.The designed accelerometer is ideal for the usage in the special test in high impact environments.