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Solder Bump Maker with coining process on TSV chips for 3D packages

机译:在3D封装的TSV芯片上进行压印工艺的焊锡凸块制造商

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摘要

The electroplating and screen printing are widely used in the micro-electric industry but they have disadvantages of a complicated series of bumping process, equipments and materials. Furthermore, they are not suitable for the fine pitch bumping technology. To overcome these weak points, a maskless bumping technology using SBM has been developed. Solder Bump Masker (SBM) technology does not need any special equipment and mask tools. It is composed of solder powder and a resin. The solder is Sn58Bi and the resin is designed to have low viscosity for theological characteristics of the solder droplets. In this paper, we optimized the bumping condition with controlling the process time. After bumping, the coining process, which the various loads were applied, has been investigated to get the bump with the extremely uniform heights. Finally, low-volume bumps with the excellent uniformity were successfully achieved.
机译:电镀和丝网印刷在微电子工业中被广泛使用,但是它们具有一系列复杂的撞击过程,设备和材料的缺点。此外,它们不适合细间距碰撞技术。为了克服这些弱点,已经开发了使用SBM的无掩模碰撞技术。焊锡凸版掩膜器(SBM)技术不需要任何特殊设备和掩膜工具。它由焊粉和树脂组成。焊料是Sn58Bi,并且针对焊料滴的流变特性,将树脂设计为具有低粘度。在本文中,我们通过控制处理时间来优化碰撞条件。碰撞后,已经研究了施加各种载荷的压印工艺,以使凸点具有非常均匀的高度。最终,成功实现了具有出色均匀性的小批量凸点。

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