Capacitive Silicon micro-Accelerometer's Noise Reduction Technology Research

摘要

The capacitive silicon micro-accelerometer as an important inertia device,applied in the autocar, consumer electronics, inertial guidance and so on, which has a wide application prospect.Improving the detection accuracy of capacitive accelerometer has been an important research direction,which is the key to reduce the noise, the noise mainly include the mechanical thermal noise and noise of electric circuits. Noise reduction measures were described,for example, the design of sensitive units, highfrequency carrier frequency range selected, the choice of amplifier operation and so on, to reduce noise and improve sensitivity. Through the testing of the effect of noise, the sensitivity is better than the relevant reports.