首页> 外文会议>Conference on Emerging Lithographic Technologies >Photonic crystals from step and flash imprint lithography
【24h】

Photonic crystals from step and flash imprint lithography

机译:来自阶梯和闪光印记光刻的光子晶体

获取原文

摘要

Photonic crystals are structures which exhibit a band gap in the electromagnetic spectrum as a result of dielectric periodicity. These structures present the potential to control electromagnetic waves in a similar manner to the way electrons are controlled by semiconductors. To obtain a photonic band gap in a specific region of the spectrum, there are two important characteristics of the photonic crystal that must be considered. The first is the length scale of the periodicity of the crystal, which governs the frequency range in which the band gap falls. The second is the dielectric contrast between the two media which comprise the crystal, which controls the size of the bang gap. Therefore, to construct a photonic crystal which could be used as an optical device, such as a waveguide or filter, the features should be on the order of optical wavelengths, or nanometers. The dielectric contrast through the visible region should also be large enough to open a band gap. Lithography techniques are ideally suited to pattern such structures. This work focused on the use of step and flash imprint lithography as an ideal patterning technology for two dimensional photonic crystals because of its capability for sub-50 nm patterning. Another attractive aspect of using step and flash imprint lithography is the potential to pattern a functional polymer as the crystal. The feasibility of printing structures needed for photonic crystals using imprint lithography was first demonstrated. Then, a strategy to raise the index of refraction of imprint compatible polymer formulations for large dielectric contrast using metal oxide nanoparticles was investigated. A maximum index of n = 1.65 was achieved, but at the high nanoparticle concentrations needed to reach this value, the formulations would not photocure. At low concentrations, imprints were obtained and uses for the resulting moderate index polymer composites as partial band gap photonic crystals were suggested.
机译:光子晶体是由于介电周期性而在电磁谱中表现出带隙的结构。这些结构呈现了以与半导体控制的方式类似的方式控制电磁波的电位。为了在光谱的特定区域中获得光子带隙,必须考虑的光子晶体的两个重要特征。第一是晶体周期性的长度,该周期性地控制带隙落下的频率范围。其间是两个介质之间的介质对比,其包括晶体的晶体,其控制爆炸隙的尺寸。因此,为了构造可用作光学装置的光子晶体,例如波导或过滤器,该特征应在光波长或纳米的顺序上。通过可见区域的电介质对比度也应该足够大以打开带隙。光刻技术理想地适用于这种结构。这项工作主要用于使用步骤和闪光印记光刻作为二维光子晶体的理想图案化技术,因为其对Sub-50 NM图案化的能力。使用步骤和闪光印记光刻的另一个有吸引力的方面是将功能性聚合物作为晶体的潜力。首先证明了使用压印光刻所需的光子晶体所需的打印结构的可行性。然后,研究了一种利用金属氧化物纳米颗粒提高压印互相聚合物制剂的压印相容性聚合物制剂的折射率的策略。实现了n = 1.65的最大指标,但在达到该值所需的高纳米颗粒浓度下,制剂不会是光织物。在低浓度下,获得压印并用于所得的中等指数聚合物复合材料,提出了部分带隙光子晶体。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号