Modeling and Design-driven Simulation of Integrated Piezo-resistive Pressure Measuring Systems

摘要

Basically, integrated piezo-resistive sensing elements exhibit parasitic features that have to be suppressed as necessary. To ensure proper functioning of such integrated elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful in determining operation characteristics and verifying performance before manufacturing. Thus, the need for test iterations decreases, and therefore, cost and time-to-market can be reduced significantly. Based on simulations with commercial CAE systems (ANSYS, SABER, ATHENA) and an advanced behavioral model for integrated sensing elements, a seamless design-driven modeling and simulation flow has been developed and implemented. This new approach proven with first results is given. This work has been funded within the project MODSYS under label 16SV1411 by the German ministry for education and research (BMBF = Bundesministerium fuer Bildung und Forschung). The authors of this paper are solely responsible for its content.